Trench fill process

ABSTRACT

A process for insulating the interior of the trenches of trench type MOSgated devices in which a capping oxide is formed over the top of the trenches to span approximately a 3 micron gap and then reflowing the oxide at 1050° C. in pure O 2  to flush air out of the trenches and leaving an at least partially evacuated sealed volume in each of the trenches.

RELATED APPLICATIONS

[0001] This application claims the benefit of U.S. Provisional Application No. 60/391,794, filed Jun. 25, 2002.

FIELD OF THE INVENTION

[0002] This invention relates to the processing of semiconductor devices and more specifically relates to the formation of trench type superjunction semiconductor devices.

BACKGROUND OF THE INVENTION

[0003] Superjunction semiconductor devices are known in which a plurality of spaced narrow deep trenches are formed in the surface of a silicon substrate. Dielectric filled trenches may also be needed for other semiconductor devices. These trenches are filled with a dielectric medium. The filling process is complicated because the trenches are very narrow and very deep, for example, 3 to 5 microns wide and 40 to 50 microns deep.

[0004] A multistep process has been used employing the deposition of a dielectric, such as an oxide, followed by an etch back process. This was needed due to the dielectric layer non-conformity, i.e., the ratio of the dielectric thickness on the horizontal surface of the substrate to the dielectric thickness on a vertical surface is greater than one. As a result, a gap is formed inside the trench, and to fill the gap completely, the top of the dielectric is etched back, removing all dielectric from the horizontal surface, leaving only the dielectric on the vertical trench surface. This process is then repeated until the gap is completely filled.

[0005] It would be desirable to form a dielectric filled trench with a less complex and less costly process.

[0006] A further problem with the prior art process is that the dielectric material filling the trench has a temperature coefficient of expansion which differs from that of the monocrystalline silicon in which the trench is formed. Thus, a mechanical stress is applied to the silicon as it is heated during processing and in operation.

[0007] It would be desirable to eliminate the stress on the silicon due to differential temperature expansion of a filler and a trench.

BRIEF SUMMARY OF THE INVENTION

[0008] In accordance with the invention, a dielectric cap is formed over the top of a narrow, deep trench in silicon to seal the interior volume of the trench, leaving a vacuum or a low pressure high dielectric gas, for example, air, sealed within the trench.

[0009] Thus, a dielectric such as a low temperature oxide (LTO) or a PECVD oxide is deposited on the surface of a substrate containing one or more trenches to form a “bridge” over the top of each trench. The interior of the trench is fully or partly evacuated during this process and the vacuum or residual gas acts as the desired dielectric.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010]FIG. 1 is a cross-section of a silicon substrate, showing a first embodiment of the invention.

[0011]FIG. 2 is a cross-section showing the invention as applied to the trench of a superjunction device.

DETAILED DESCRIPTION OF THE DRAWINGS

[0012] Referring first to FIG. 1, there is shown, in cross-section, a silicon substrate 10, which may be N type and which is to contain a plurality of parallel trenches 11, 12 for any desired purpose, for example, usually to form a superjunction type device. It is necessary to fill the trenches with a dielectric and, when a solid dielectric, such as silicon dioxide is used, it has been hard to uniformly fill the trench interiors which may be about 40 microns deep, but only about 3 microns wide.

[0013] In accordance with the invention, an oxide of silicon 13 such as an LTO or PECVD deposited oxide is deposited atop the surface 14 of substrate 10, lining the sides of trenches 13 and forming a sealing cap 15 at the top of each trench.

[0014] The interior space 16 of the trenches is at least a partial vacuum, defining the dielectric of the interior space.

[0015] In one method of forming the dielectric 13, a first layer of TEOS which is about 7500 Å thick is first deposited, followed by a deposition of Si₃N₄ to a thickness of about 1500 Å. The nitride layer prevents the diffusion of phosphorus from a subsequent P doped layer into the silicon walls of the trench. A capping oxide layer to cap the about 3 micron opening of the trenches is formed of a P doped layer of low temperature oxide, which is about 1.5 microns thick, forming a “plug” 15 about 3 microns wide. The oxide layers are then reflowed at 1050° C. in pure oxygen to flush out air, leaving the sealed interior 16 of the trenches evacuated vacuum or partial vacuums. When the trench closes, any remaining O₂ will oxidize the silicon walls, and will be consumed.

[0016] In another method of the invention, an initial step of depositing 7500 Å of TEOS is followed by a 5 to 90 second overetch step. Thereafter, the steps described above may be carried out.

[0017]FIG. 2 is a cross-section like FIG. 1, showing the invention applied to a superjunction geometry. Thus, trench 12 is doped P type (region 30) which has a total charge to balance the total charge of the N⁻ drift region 10 between trenches. An oxide liner 13 lines the trench and is capped by the oxide cap 15, leaving an evacuated, or partly evacuated volume 16.

[0018]FIG. 2 further shows a section like that of FIG. 1, for a superjunction device, using known trench gate 31, N⁺ source regions 32, 33 and a metal (aluminum) source electrode 34. A further drain electrode (not shown) is connected to the bottom of the N⁺ substrate 40 which carries the epitaxially deposited N⁻ layer 10.

[0019] Although the present invention has been described in relation to particular embodiments thereof, many other variations and modifications and other uses will become apparent to those skilled in the art. It is preferred, therefore, that the present invention be limited not by the specific disclosure herein. 

What is claimed is:
 1. In a trench type semiconductor device; a silicon substrate having a top surface and having at least one vertical trench extending from said top surface to a given depth; the top of said vertical trench having a sealing cap to prevent the flow of gas into or out of the interior of said trench; the interior of said trench being filled with a gas at a pressure which is lower than atmospheric pressure.
 2. The device of claim 1, in which said trench has parallel side walls of a given spacing.
 3. The device of claim 2, wherein said trench depth is greater than said given spacing.
 4. The device of claim 1, wherein said sealing cap is an oxide.
 5. The device of claim 1, wherein the side walls of said trenches are lined with a gate oxide.
 6. The device of claim 3, wherein said sealing cap is an oxide.
 7. The device of claim 3, wherein the side walls of said trenches are lined with a gate oxide.
 8. The device of claim 1, which further includes in plurality of parallel disposed trenches each having the structure of said trench and its said sealing cap.
 9. The device of claim 2, which further includes in plurality of parallel disposed trenches each having the structure of said trench and its said sealing cap.
 10. The device of claim 3, which further includes in plurality of parallel disposed trenches each having the structure of said trench and its said sealing cap.
 11. The device of claim 4, which further includes in plurality of parallel disposed trenches each having the structure of said trench and its said sealing cap.
 12. The device of claim 5, which further includes in plurality of parallel disposed trenches each having the structure of said trench and its said sealing cap.
 13. The device of claim 1, wherein the sidewalls of said trenches are lined with a deposited oxide.
 14. The device of claim 1, wherein the sidewalls of said trenches are lined further with a deposited nitride.
 15. The process of manufacturing the trench of a power MOSFET having a trench topology; said process comprising the steps of; (a) forming a plurality of spaced trenches which extend vertically into the top surface of a silicon wafer; (b) at least partially evacuating the interior of each of said trenches to a given gas pressure with a given gas; (c) and sealing the top of each of said trenches with a sealing cap to maintain at least a partial vacuum in the interior of said trenches.
 16. The process of claim 15, wherein said sealing cap is an oxide.
 17. The process of claim 16, wherein said capping oxide is a P doped low temperature oxide.
 18. The process of claim 16, wherein said oxide sealing cap is reflowed at about 1050° C. in pure oxygen to flush gas out of the interior of said trenches. 